Precision micromachining
ExactPro™
ExactPro is a laser micromachining workstation with a square bed — 310 × 310 mm or 670 × 670 mm — and the part carried under a LaserSharp® LPM on a dual-linear-motor XY stage. It registers each part, compensates for distortion, and calibrates its own scan field. Cleanroom configuration is standard.
Sheets, boards, or plates larger than 670 × 670 mm run on SheetPro™. Roll or sheet to finished parts, continuously, runs on SmartFinish™. Starting out, or proving a process on the bench — ExactCore™.
Specifications
| Bed | 310 × 310 mm or 670 × 670 mmSquare beds. Covers wafers to 300 mm, 310 mm panel-level packages, 510 × 515 mm glass interposer and 600 × 600 mm PLP on the 670 bed, with fixturing. |
|---|---|
| Motion | Dual linear motors, XY stage |
| Repeatability | 10 µmPositional repeatability of the stage. Feature size is set by the laser module and established on your material in the trial. |
| LaserSharp® LPMs | 1 |
| Laser sources | NIR (1030–1064 nm), green, UV, and CO₂ LaserSharp® LPMs; nanosecond to femtosecond pulses on the solid-state sources |
| Registration | Automated registration with distortion compensation, plus vision registrationBoth standard. |
| Calibration | Self-calibrating — the machine verifies and corrects its own scan-field and stage accuracy |
| Fixturing | Vacuum and clamp, both standard |
| Cleanroom | Standard configuration |
| Material handling | Manual, or full automatic load and unload |
| Design life | 15+ years |
Configure-to-order
- Bed — 310 × 310 mm or 670 × 670 mm
- Femtosecond LPM — for through-glass vias and glass interposer work
- Full automatic load and unload
- Laser source selected on your material
- µVerify™ — in-line inspection that measures feature size and position and feeds closed-loop control of the laser parameters, plus Pulse beam confirmation. Which features are measured depends on the application.
ExactPro exists for work where the position of every feature across a panel matters as much as the feature itself. The part is fixtured on a dual-linear-motor XY stage and carried under the LaserSharp® LPM with 10 µm positional repeatability. Each sheet is registered and its distortion mapped before it is processed, and the machine verifies and corrects its own scan-field and stage accuracy. Throughput for a given panel is established in the trial.
In production
See it run
Questions buyers ask
How does distortion compensation work on printed or laminated sheets?
The machine reads registration features on each sheet and maps the actual geometry against the nominal file, then warps the toolpath to match. This matters most on laminated or humidity-sensitive stock, where the sheet no longer matches the CAD it was designed from.