Precision micromachining

ExactPro™

ExactPro is a laser micromachining workstation with a square bed — 310 × 310 mm or 670 × 670 mm — and the part carried under a LaserSharp® Module on a dual-linear-motor XY stage. It registers each part, compensates for distortion, and calibrates its own scan field. Cleanroom configuration is standard.

Sheets, boards, or plates larger than 670 × 670 mm run on SheetPro™. Roll or sheet to finished parts, continuously, runs on SmartFinish™. Starting out, or proving a process on the bench — ExactCore™.

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ExactPro laser micromachining workstation with the LightGuide® operator panel, shown with an automatic unload conveyor, a custom configuration

Specifications

Bed	310 × 310 mm or 670 × 670 mmSquare beds. Covers wafers to 300 mm, 310 mm panel-level packages, 510 × 515 mm glass interposer and 600 × 600 mm panel-level packaging (PLP) on the 670 bed, with fixturing.
Motion	Dual linear motors, XY stage
Repeatability	10 µmPositional repeatability of the stage. Feature size is set by the laser module and established on your material in the trial.
LaserSharp® Modules	1
Laser sources	NIR (1030–1064 nm), green, UV, and CO₂ LaserSharp® Modules; nanosecond to femtosecond pulses on the solid-state sources
Registration	Automated registration with distortion compensation, plus vision registrationBoth standard.
Calibration	Self-calibrating — the machine verifies and corrects its own scan-field and stage accuracy
Fixturing	Vacuum and clamp, both standard
Cleanroom	Standard configuration
Material handling	Manual, or full automatic load and unload
Laser safety	Class 1 laser product (embedded Class 4 laser)IEC 60825-1:2014 · 21 CFR 1040.10 and 1040.11, per Laser Notice No. 56
Compliance	Electrical panels are labeled as UL 508A open industrial control panel. CE marking, or third-party TÜV certification, available on request.
Design life	15+ years

Configure-to-order

Bed: 310 × 310 mm / 670 × 670 mm
Femtosecond module — for through-glass vias and glass interposer work
Full automatic load and unload
Laser source selected on your material
µVerify™ — in-line inspection that measures feature size and position and feeds closed-loop control of the laser parameters, plus Pulse beam confirmation. Which features are measured depends on the application.

ExactPro exists for work where the position of every feature across a panel matters as much as the feature itself. The part is fixtured on a dual-linear-motor XY stage and carried under the LaserSharp® Module with 10 µm positional repeatability. Each sheet is registered and its distortion mapped before it is processed, and the machine verifies and corrects its own scan-field and stage accuracy. Throughput for a given panel is established in the trial.

In production

ExactPro with the enclosure door open, showing the LaserSharp® Module over the XY stage on the granite base — Enclosure door open: the LaserSharp® Module over the XY stage on its granite base. Shown with automatic unload, a custom configuration. Standard loading is manual.

ExactPro laser micromachining workstation with its LightGuide® operator console — On the LasX floor, at the LightGuide® operator console.

Biochip laminate with laser-cut micro-features — Biochip laminate processed on ExactPro.

See it run

Electronic and medical parts — ExactPro cutting and micromachining electronic and medical components from sheet.

Want to see it on your material? Send a sample and we will run it in the lab and send the footage back.

Industries

Processes

Questions buyers ask

How does distortion compensation work on printed or laminated sheets?

The machine reads registration features on each sheet and maps the actual geometry against the nominal file, then warps the toolpath to match. This matters most on laminated or humidity-sensitive stock, where the sheet no longer matches the CAD it was designed from.