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LasX

Industry

Semiconductors & Advanced Packaging

LasX laser-cuts and kiss-cuts the consumables semiconductor production runs on — process tapes, die attach film, thermal interface pads, electromagnetic interference (EMI) shielding films, adhesive gaskets and release liners — roll-to-roll and toolless, as equipment or contract manufacturing. For glass, silicon and wide-bandgap substrates, LasX develops scanner-based femtosecond processes for through-glass vias, scribing and thin-film ablation on ExactPro. The work starts where the wafer or panel leaves the fab and needs a hole, a scribe, or a pattern that a saw or a mask cannot make.

3 × 3 array of 300 µm laser-drilled through-glass vias on a 450 µm pitch, transmitted-light micrograph with measurements
25 µmSmallest demonstrated feature, NIR or shorter wavelengths
10 nsController output timing resolution
10 MHzIndividual pulse control

Applications

What LasX equipment does in Semiconductors & Advanced Packaging

Transfer adhesive laser-cut to shape on its release liner
Kiss-cutting

Process tapes and adhesive films

Adhesive cut to shape and left on its liner, the same construction as process tapes and die attach film. Kiss-cut depth is controlled digitally, and features run to 25 µm with NIR or shorter wavelengths and 50 µm in CO₂ production.

3 × 3 array of 300 µm laser-drilled through-glass vias on a 450 µm pitch, reflected-light micrograph with measurements
Drilling

Through-glass vias and glass-core drilling (development)

300 µm vias on a 450 µm pitch, laser-drilled in glass in the PhotonX lab (2026). Diameter and pitch hold within a few microns of nominal; taper and sidewall condition are the development targets. Feature metrology comes in a written report.

See it on your materialSend a sample →
Cutting

Scribing and singulation (development)

Scribing and singulation of glass, silicon, silicon carbide (SiC) and gallium nitride (GaN). Ultrashort pulses keep the heat-affected zone (HAZ) and micro-cracking down.

Why laser, in this market

01

The tapes and films a fab consumes are converted parts

Dicing and back-grind tapes, die attach film, thermal pads and shielding films are multilayer webs cut to shape in short runs. A laser cuts and kiss-cuts them with no die, so a design change is a file change and a prototype ships without tooling lead time.

02

Developed on your material before you buy anything

Wavelength, burst regime, fluence, and scan strategy are chosen on your actual material in the PhotonX lab, with feature metrology and HAZ characterization in a written report. The trial produces the starting recipe and process record for the workstation you buy, or for our floor while your volumes grow.

03

Glass, wafer and thin-film processes in development

Chiplets, high-bandwidth memory, and 3D heterogeneous integration are moving substrates to glass and to thicker panels. Through-glass vias, glass-core drilling, and crack-free singulation are laser jobs — scanner-based femtosecond jobs — and they sit alongside lithography, not in place of it. A femtosecond pulse removes material before heat spreads, which is what keeps the heat-affected zone and micro-cracking down in glass, SiC, and GaN. Proton λ controls pulse output at 10 ns timing resolution, and pulse-on-demand is designed to hold pitch and energy through acceleration and micro-vectors; achieved placement is measured on the substrate in the trial. These processes are in development in the PhotonX lab, with trial data reported per substrate.

Buy the equipment

Buy the equipment

LaserSharp® Modules and MicroLam™ cut and kiss-cut tapes, films and adhesive stacks on a moving web, with no die to buy, store or wear out. ExactPro runs wafer, panel, and substrate work — wafers to 300 mm and 310 mm panel-level packages, with 510 × 515 mm glass interposer and 600 × 600 mm panel-level packaging (PLP) on the 670 mm bed. In its femtosecond configuration that means an NIR, green, or UV ultrashort-pulse source, scanner-based delivery, automated fiducial registration, and Proton λ pulse-on-demand timing. Multi-head and roll-to-roll configurations for volume are engineered as custom equipment.

  • No die cost, no die lead time, a part change is a file change
  • Kiss-cut depth held digitally on release-lined stock
  • Controller output timing resolution of 10 ns; individual pulse control at up to 10 MHz. Optical pulse placement depends on the source, scanner, and process configuration
  • Registration to fiducials with X/Y/θ and four-point distortion correction
  • XY-stage processing of multi-feature panels, registered sheet by sheet
  • Wavelength and burst regime chosen for the substrate, proven in the lab before the build
Have us make the parts

Have us make the parts

Process development and pilot production in the PhotonX lab and on the LasX floor — feasibility coupons through qualified pilot lots — while your packaging roadmap and volumes settle. Parameters transfer to a machine of your own when they are ready.

  • A written process report — parameters, feature metrology, edge and HAZ characterization
  • Pilot production without capital until volumes justify a machine
  • A recipe that moves with you to a workstation on your floor

Semiconductor production runs on converted consumables — tapes, films, thermal and shielding parts — as much as on wafers. Converting those is what LasX does at volume.

LasX builds the scanner-based ultrashort-pulse machine tools that sit alongside lithography — and, before that, proves the process on your substrate on our floor. The glass and wafer processes on this page are in development in the PhotonX lab.

More from production

Single laser-drilled through-glass via in transmitted light, measured at 303 µm
One via from the array in transmitted light, measured at 303 µm across. Process development in the PhotonX lab, 2026.
Single laser-drilled through-glass via in reflected light, measured at 304 µm
The same via in reflected light, 304 µm. The light rim outside the aperture is the tapered sidewall seen from above — taper is the parameter still being driven down.

Questions we get asked

Do you cut dicing tape, back-grind tape and die attach film?

We cut and kiss-cut adhesive-coated films and multilayer tape constructions roll-to-roll, as equipment or as contract manufacturing. Whether a given construction meets your edge, cleanliness and dimensional specification is answered by a trial on your material, not a datasheet. Send the material.

Where in semiconductor production does LasX work?

We build scanner-based laser machine tools and develop the processes that run on them. The work starts after the fab — vias, scribes, singulation, thin-film patterning, and interposer cutting in back-end and advanced packaging — where a focused ultrashort-pulse beam is the right tool.

Which substrates have you processed?

Glass (borosilicate and soda-lime), silicon, silicon carbide, gallium nitride, sapphire, technical ceramics, polyimide and other polymer interposers, and thin metal films on dielectrics. Whether a given construction meets a given specification is answered by a trial, not a datasheet — send the material.

How do you handle through-glass vias at volume?

Scanner-based delivery with pulse-on-demand timing keeps energy per pulse constant through the scan, and vision registration holds the via field to fiducials across the panel. Throughput and via geometry are coupled; a trial on your glass thickness establishes both before a machine is quoted.

The fastest way to find out is to send us the material.

Trials in the PhotonX lab come back as processed samples and a written report — not a proposal.